Phase transitions in liquids determined using micromechanical resonators

Fabricated microcantilever of width 20 µm and length 250 µm (photo taken by Erdal Uzunlar)
Frequency response of 200 µm cantilever: amplitude and phase shift over frequency

Microcantilevers are the most simplified micromechanical system (MEMS) devices and became recently important for biological and chemical sensing. This project aims in characterizing the changes in frequency response of microcantilevers of various lengths in changing conditions of the environments. Understanding the behavior of microcantilevers in high pressure conditions and relates the frequency response of the microcantilevers to thermodynamical properties of the surrounding fluid can help us inventing new measurement techniques, i.e. for density and viscosity.