Integrated humidity sensor based on SU-8 polymer microdisk microresonator

M. Eryürek, Z. Tasdemir, Y. Karadag, S. Anand. N. Kılınç, B. E. Alaca, and A. Kiraz*
Sensor. Actuat. B-Chem. 242, 1115-1120 (2017)
DOI: 10.1016/j.snb.2016.09.136 (PDF)